ANISOTROPY AND NONLOCALITY OF THE ELECTRON-DISTRIBUTION FUNCTION OF THE LOW-PRESSURE DC DISCHARGE IN CF4

Authors
VOLYNETS VN IVANOV VV RAKHIMOV AT RAKHIMOVA TV SLOVETSKII DI
Citation
Vn. Volynets et al., ANISOTROPY AND NONLOCALITY OF THE ELECTRON-DISTRIBUTION FUNCTION OF THE LOW-PRESSURE DC DISCHARGE IN CF4, Plasma physics reports, 23(1), 1997, pp. 62-70
Citations number
21
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Plasma physics reports → ACNP
ISSN journal
1063780X
Volume
23
Issue
1
Year of publication
1997
Pages
62 - 70
Database
ISI
SICI code
1063-780X(1997)23:1<62:AANOTE>2.0.ZU;2-U
Abstract
For the electronegative gas CF4, the effect of the enhanced ion diffus ion in strong fields, the anisotropy and nonlocality of the electron d istribution function in the de discharge on the structure, and the loc al characteristics of the discharge are examined. The calculations wer e performed by means of the fast version of the Monte Carlo method wit h the use of a PC. For comparison, the calculations in the self-consis tent local model of the discharge were also performed.