A. Ilzhofer et al., DEVELOPMENT OF PASSIVE MICROVALVES BY THE FINITE-ELEMENT METHOD, Journal of micromechanics and microengineering, 5(3), 1995, pp. 226-230
The combination of a stiff titanium membrane and a flexible polyimide
membrane was used to form a check valve for a micropump. This work is
concerned with calculating the performance of such a microvalve and mo
difying its design so that instead of acting as an inlet valve, it fun
ctions as an outlet valve. It will be demonstrated here by application
of the finite element method how design solutions can be found to thi
s problem. Both the deflection behavior of the microvalve membrane exp
osed to the pressure and the stresses generated at the clamping points
of the membrane structures have been calculated.