EXCIMER-LASER INDUCED CVD AND ITS APPLICATION TO SELECTIVE NONPLANAR METALLIZATION

Ultraviolet laser induced selective chromium metallization of a non-pl aner microscopic surface is established. The chromium film deposited f rom the gas phase Cr(CO)(6) precursor showed low electric conductivity because of impurities such as carbon oxygen produced as side-products of the photochemical reaction of; the precursor. In order to obtain h ighly conductive metallization on non-planer surface, a two-step patte rning method is studied. As the first step, conductive nickel film is formed around three-dimensional polyurethane substrates by using an el ectroless plating method. In the second step, chromium is selectively deposited on the nickel layer employing the UV laser induced CVD metho d. The nickel layer is then selectively etched using the chromium as a mask. The conductive nickel pattern is successfully achieved employin g the two-step patterning method. As an application example of these n ew fabrication techniques, we propose a built-in tactile sensor at the probe-head of a catheter. A fabricated prototype of the tactile senso r is reported.