AN EMPIRICAL-MODEL FOR PLANARIZATION WITH POLYMER-SOLUTIONS

In our search for a simple equation of use to technologists, an empiri cal model has been developed based on the calculation of a unique plan arization constant specific to the polymer solution. The model enables calculation of the degree of planarization (DOP) over isolated lines as well as over periodic lines, and is observed to fit experimental da ta for various polymer solutions, with varying film thicknesses and ov er various sizes of isolated and periodic features.