SMALL-ANGLE X-RAY-SCATTERING STUDIES OF A-SI-C-H

Small-angle X-ray scattering studies have been performed on a series o f four a-Si:C:H alloys, prepared by rf glow discharge decomposition of varying proportions of propane and silane, in an attempt to elucidate their mesoscopic structure. The observed broad scattering peak has be en interpreted as originating from irregular, elongated voids with a r epeat distance of about 20 Angstrom and correlation length of about 25 Angstrom. The implications of this result in explaining the photo-oxi dation properties of the material are also discussed.