ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS BATIO3 THIN-FILMS GROWN BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION ON INDIUM TIN OXIDE-COATEDGLASS

In order to fabricate insulating films for a full-color thin-film elec troluminescent display, an amorphous BaTiO3 thin film was deposited on an indium tin oxide-coated soda lime glass substrate at a low substra te temperature by metalorganic chemical vapor deposition with use of B a(tmhd)(2), Ti(OC3H7)(4) and N2O. Scanning electron microscopy of the tilted surface of the as-grown BaTiO3 film showed a surface morphology of granular-like micrograins without defects such as pinholes and clu sters. The thickness of the as-deposited film was approximately 1400 A ngstrom as confirmed by cross-sectional transmission electron microsco py. The formation Df an interface film between the as-grown film and t he indium tin oxide was not observed. Room-temperature frequency depen dence of capacitance and dissipation factor was clearly indicated thos e typically exhibited by the amorphous BaTiO3 capacitor deposited on t he conducting substrates having a metal-insulator-metal (MIM) structur e. Optical transmittance measurements showed that the amorphous BaTiO3 film deposited at 400 degrees C on the indium tin oxide-coated glass substrate has the transparency of about 80% in the visible wavelength range. Furthermore, the value of the optical band gap was approximatel y 4.71 eV. These results indicate that the amorphous BaTiO3 thin film grown on the indium tin oxide-coated glass can be used for thin-film f lat panel electroluminescent display applications.