Ys. Yoon et al., ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS BATIO3 THIN-FILMS GROWN BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION ON INDIUM TIN OXIDE-COATEDGLASS, JPN J A P 1, 33(12A), 1994, pp. 6663-6666
In order to fabricate insulating films for a full-color thin-film elec
troluminescent display, an amorphous BaTiO3 thin film was deposited on
an indium tin oxide-coated soda lime glass substrate at a low substra
te temperature by metalorganic chemical vapor deposition with use of B
a(tmhd)(2), Ti(OC3H7)(4) and N2O. Scanning electron microscopy of the
tilted surface of the as-grown BaTiO3 film showed a surface morphology
of granular-like micrograins without defects such as pinholes and clu
sters. The thickness of the as-deposited film was approximately 1400 A
ngstrom as confirmed by cross-sectional transmission electron microsco
py. The formation Df an interface film between the as-grown film and t
he indium tin oxide was not observed. Room-temperature frequency depen
dence of capacitance and dissipation factor was clearly indicated thos
e typically exhibited by the amorphous BaTiO3 capacitor deposited on t
he conducting substrates having a metal-insulator-metal (MIM) structur
e. Optical transmittance measurements showed that the amorphous BaTiO3
film deposited at 400 degrees C on the indium tin oxide-coated glass
substrate has the transparency of about 80% in the visible wavelength
range. Furthermore, the value of the optical band gap was approximatel
y 4.71 eV. These results indicate that the amorphous BaTiO3 thin film
grown on the indium tin oxide-coated glass can be used for thin-film f
lat panel electroluminescent display applications.