CHARACTERIZATION AND MODIFICATION OF AMORPHOUS-CARBON FILMS CONSISTING OF SP(2) AND SP(3) BONDS USING MAGNETO-PLASMA DYNAMIC ARC-JET

A magneto plasma dynamic are-jet (MPD arc-jet) can introduce a large e nergy pulse to a source gas and enable synthesis amorphous carbon film s consisting of sp(2) and sp(3) bonds (hybrid amorphous carbon). The p rocess condi tions which affect the structure and the properties of th e synthesized films are described here. Homogeneous films were obtaine d using the MPD are-jet technique. Films were also in-situ, modified w ith modifier gases due to the excellent characteristics of the MPD are -jet. A substrate temperature of 200 degrees C and a bias potential of -200 V resulted in harder films. The hardness are related to the hydr ogen content and chemical bond nature of the carbon in the films, Homo geneity in the deposition direction could be achieved by in-situ modif ication, The refractive index, hardness, and other properties of the f ilms were controlled by this modification.