H. Yamaoka et al., DEVELOPMENT AND SURFACE EVALUATION OF LARGE SIC X-RAY MIRRORS FOR HIGH-BRILLIANCE SYNCHROTRON-RADIATION, JPN J A P 1, 33(12A), 1994, pp. 6718-6726
Flat SIC mirrors coated with Pt, of which size are 800x50 mm(2) and 10
00x140 mm(2) in area are developed for high-brilliance synchrotron rad
iation. The large mirrors are well polished over the entire area from
the viewpoint of surface roughness for application to the use for the
synchrotron radiation beamline. The performance of the large mirror su
rface is evaluated by the measurements of not only reflectivity near t
he critical angle but also of the angle-resolved scattering (ARS) curv
e as a function of mirror surface position at several glancing angles
with CuK alpha X-rays from a rotating target at the 30-m-long X-ray be
amline facility of ISAS. By analyzing the ARS curves the power spectra
l density functions are derived as a function of the surface wave numb
er. It is suggested that the large mirror may have a fractal surface f
inish like that of small mirrors. Evaluation of the longitudinal mirro
r curvature on the order of 10 km from the reflected beam profile widt
h is also described. The results are compared with the measurements of
the laser interferometers.