Two kinds of reactively evaporated titanium nitride films with columna
r (B-o films) and fine-grained (B+ films) film structures respectively
have been examined as diffusion barriers preventing iron diffusion fr
om stainless steel. The iron diffusion profiles have been investigated
by 2 MeV(4)He(+) Rutherford backscattering spectrometry (RBS) at temp
eratures up to 600 degrees C. The diffusivity from 300 to 600 degrees
C is D[m(2).s.(-1)] = 1.8 x 10(-8).exp[-17/(RT)] in B-o layers and D [
m(2).s(-1)] = 5.8 x 10(-18).exp[-38/(RT)] in B-+ TiN layers. The diffu
sivities determined correspond to grain boundary diffusion, the differ
ence is a result of the different film microstructure. The low Fe diff
usivity in B-+ TiN layer makes it an efficient buffer layer for high-T
-c superconductivity power applications.