ZINC-INDIUM-OXIDE - A HIGH-CONDUCTIVITY TRANSPARENT CONDUCTING OXIDE

We report the fabrication and characterization of zinc-indium-oxide fi lms with similar electrical conductivity and better transparency in bo th the visible and infrared compared with indium-tin-oxide, a widely u sed transparent conductor in many technological applications. Dramatic ally superior transmission properties in the 1-1.5 mu m range in parti cular make zinc-indium-oxide attractive for use in infrared devices, w here transparent electrodes are required. Resisitivities as low as 400 mu Omega cm result from doping with small quantities of Sn, Al, Ga, a nd Ge are also effective dopants. Deposition on glass and quartz subst rates as amorphous films by pulsed laser deposition and dc reactive sp uttering is described. (C) 1995 American Institute of Physics.