Ti and TiN layers implanted with Fe-57 ions were studied by conversion
electron Mossbauer spectroscopy at 295 and 80 K. In as-implanted Ti s
amples the local states of iron implants were assigned to alpha-Ti(Fe)
and beta-Ti(Fe). In TiN, about 68% of iron implants replace Ti atoms
forming Fe2N and nonstoichiometric Fe-N complexes. The remaining Fe io
ns replace N atoms exhibiting alpha-Ti(Fe) and beta-Ti(Fe) states. The
protective properties of the TiN cover layer are discussed in terms o
f changes of the these states after subsequent annealing in air. (C) 1
995 American Institute of Physics.