3-DIMENSIONAL SILICON ELECTROSTATIC LINEAR MICROACTUATOR

In this paper, the fabrication of a three-dimensional (3D) silicon lin ear microactuator is described. This actuator is realized by anisotrop ic chemical etching of a (110)-oriented silicon wafer. The silicon mon olithic structure of the microactuator comprises a fixed part bonded o nto a glass substrate and a movable part suspended from two elastic be ams. The displacement of the movable part is consequently frictionless , driven by electrostatic forces. We present the steps of the etching process and initial results concerning mechanical and electrostatic te sts. Finally, some projected applications are discussed.