S. Mitrovic et al., LOCALLY ONE-DIMENSIONAL APPROACH TO DIFFUSION PROCESS SIMULATION IN NONPLANAR DOMAINS, Electronics Letters, 31(20), 1995, pp. 1788-1789
A new approach to diffusion process simulation in 2-D domains with non
planar and moving boundaries, which combines the orthogonal numerical
co-ordinate transformation associated with the alternative direction i
mplicit (ADI), solving procedure and geometric splitting of the impuri
ty diffusion equation into locally one-dimensional problems, is propos
ed.