MODIFIED SYNTHESIS METHODS AND PHYSICOCHEMICAL STUDY OF AZIDOPHOSPHORANES AS MATERIALS FOR PHOTORESISTS-DIFFUSANTS

Authors
GALAI BO BUSYGINA LA YURRE TA
Citation
Bo. Galai et al., MODIFIED SYNTHESIS METHODS AND PHYSICOCHEMICAL STUDY OF AZIDOPHOSPHORANES AS MATERIALS FOR PHOTORESISTS-DIFFUSANTS, Russian journal of applied chemistry, 67(12), 1994, pp. 1751-1753
Citations number
16
Categorie Soggetti
Chemistry Applied
Journal title
Russian journal of applied chemistry → ACNP
ISSN journal
10704272
Volume
67
Issue
12
Year of publication
1994
Part
1
Pages
1751 - 1753
Database
ISI
SICI code
1070-4272(1994)67:12<1751:MSMAPS>2.0.ZU;2-E
Abstract
Azidophosphorane derivatives have been proposed as light-sensitive and doping components of photoresists-diffusants. Methods for their synth esis have been developed and improved, and the main physicochemical an d phototechnical characteristics of these compounds in solutions and i n cyclohexanone polymer matrices have been determined.