8X8 ARRAY OF THIN-FILM PHOTODETECTORS VERTICALLY ELECTRICALLY INTERCONNECTED TO SILICON CIRCUITRY

This paper reports the integration of an 8 x 8 array of thin-film GaAs -AlGaAs photodetectors onto a silicon-oscillator array circuit for mas sively parallel-image processing applications, Each detector was elect rically connected to the oscillator below it using vertical electrical interconnections. Both sides of the thin-film devices were metallized for electrical contact, which minimized the interconnection density o n the silicon circuit, thereby maximizing the available signal process ing area, The yield of this integrated array and associated circuit wa s 100%, with the majority of pixels demonstrating a dynamic range of 5 0 dB.