MONOLITHIC INTEGRATED-OPTIC POSITION DISPLACEMENT SENSOR USING WAVE-GUIDE GRATINGS AND QW-DFB LASER/

Authors
SUHARA T TANIGUCHI T UEMUKAI M NISHIHARA H HIRATA T IIO S SUEHIRO M
Citation
T. Suhara et al., MONOLITHIC INTEGRATED-OPTIC POSITION DISPLACEMENT SENSOR USING WAVE-GUIDE GRATINGS AND QW-DFB LASER/, IEEE photonics technology letters, 7(10), 1995, pp. 1195-1197
Citations number
11
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
7
Issue
10
Year of publication
1995
Pages
1195 - 1197
Database
ISI
SICI code
1041-1135(1995)7:10<1195:MIPDSU>2.0.ZU;2-E
Abstract
A monolithic fully-integrated interferometer position/displacement sen sor is proposed. The device is implemented with waveguide grating comp onents, a GRIN SCH SQW DFB laser and photodiodes. A prototype device o f 6.5 x 2.0 mm(2) chip size and 0.4 x 0.4 mm(2) sensing beam aperture is fabricated, and the sensor operation of submicron resolution is dem onstrated.