THE NEW HEIDELBERG PROTON MICROPROBE - THE SUCCESS OF A MINIMAL CONCEPT

Authors
TRAXEL K ARNDT P BOHSUNG J BRAUNDULLAEUS KU MAETZ M REIMOLD D SCHIEBLER H WALLIANOS A
Citation
K. Traxel et al., THE NEW HEIDELBERG PROTON MICROPROBE - THE SUCCESS OF A MINIMAL CONCEPT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 19-25
Citations number
14
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
104
Issue
1-4
Year of publication
1995
Pages
19 - 25
Database
ISI
SICI code
0168-583X(1995)104:1-4<19:TNHPM->2.0.ZU;2-V
Abstract
The new proton microprobe is characterized by modular mounting resulti ng in easy maintenance, low cost personal computer (PC) system and sev eral new features. The most important of these being the design of the lens, its location inside the vacuum, and an elaborate system for bea m monitoring. The PC system allows for all kinds of standard data acqu isition, beam and target positioning and an automated and quick routin e for beam profile analysis. The ionoptical properties fulfil the expe ctations, which is not true for the brightness delivered from a Pennin g ion source. Focusing to a submicron beam spot results therefore in a beam current of approximate to 1 pA only. Tuning to 100 pA enlarges t he spot to 3 x 3 mu m(2).