A. Stephan et al., OPERATION OF THE NEW MICROPROBE AT BOCHUM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 31-35
The successful operation of a nuclear microprobe system using a superc
onducting solenoid as final lens is described. This system allows a mi
nimum focal length of 7.5 cm for 3 MeV protons resulting in a demagnif
ication factor of 80 at 610 cm object distance while image aberration
effects are very small. Combined with a precise computer controllable
slit system high precision STIM measurements are possible. As a new fe
ature in microprobe technology the final lens can be used to focus bac
kscattered ions, thus significantly increasing the effective detector
solid angle relative to conventional RES techniques. This leads to a h
igher sensitivity for RES analysis at low beam currents.