DAMAGE OF POLYIMIDE THIN-FILMS IRRADIATED BY MEV PROTON MICROBEAMS

Authors
KINOMURA A HORINO Y MOKUNO Y CHAYAHARA A FUJII K
Citation
A. Kinomura et al., DAMAGE OF POLYIMIDE THIN-FILMS IRRADIATED BY MEV PROTON MICROBEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 55-58
Citations number
10
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
104
Issue
1-4
Year of publication
1995
Pages
55 - 58
Database
ISI
SICI code
0168-583X(1995)104:1-4<55:DOPTIB>2.0.ZU;2-L
Abstract
Damage of a polyimide thin film irradiated by a 1.5 MeV proton microbe am was investigated by in situ micro-RES analysis. Deformation of RBS spectra as a function of irradiation dose was analyzed for beam curren ts of 0.1-14 nA. The irradiation with a beam current of 14 nA to doses from 2.6 x 10(17) to 5.2 x 10(18) H+/cm(2) caused the change of a spe ctrum height and width, while the 0.1 nA irradiation indicated no rema rkable change for the similar dose. A temperature rise caused by the m icrobeam irradiation seems to enhance the polyimide damage correspondi ng to a carbonization.