WIDE-RANGE SCANNING AND LENS CORRECTION OF AN ION MICROPROBE

Authors
MEIJER J STEPHAN A BUKOW HH ROLFS C BRUHN F
Citation
J. Meijer et al., WIDE-RANGE SCANNING AND LENS CORRECTION OF AN ION MICROPROBE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 77-80
Citations number
16
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
104
Issue
1-4
Year of publication
1995
Pages
77 - 80
Database
ISI
SICI code
0168-583X(1995)104:1-4<77:WSALCO>2.0.ZU;2-P
Abstract
The expected performance of a wide range scanning unit designed for an ion microprobe using a superconducting solenoid lens is investigated. Since the resulting spot size is mainly limited by chromatic aberrati on, the scanning unit should be installed close to the center of the s olenoid lens to achieve optimal ion optical properties. Furthermore, t he deflection system should consist of two independent controllable mu ltipole units that correct an axial astigmatism introduced by a residu al asymmetry of the solenoid lens.