2-DIMENSIONAL BORON ANALYSIS IN BOROPHOSPHOSILICATE GLASS-FILM USING TRANSMISSION ELECTRON-MICROSCOPE WITH IMAGING FILTER

Authors
SEKIGUCHI T KIMOTO K AOYAMA T MITSUI Y
Citation
T. Sekiguchi et al., 2-DIMENSIONAL BORON ANALYSIS IN BOROPHOSPHOSILICATE GLASS-FILM USING TRANSMISSION ELECTRON-MICROSCOPE WITH IMAGING FILTER, JPN J A P 2, 35(12B), 1996, pp. 1717-1719
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
35
Issue
12B
Year of publication
1996
Pages
1717 - 1719
Database
ISI
SICI code
Abstract
Two-dimensional boron concentration mapping of borophosphosilicate gla ss (BPSG) film has been performed using a transmission electron micros cope equipped with an imaging filter. The atomic ratio of boron to sil icon is obtained using core-loss electrons of boron K and silicon L(23 ) spectra. Boron concentration increases at the BPSG/phosphosilicate g lass (PSG) interface, which is consistent with the result obtained by secondary ion mass spectrometry (SIMS).