INTEGRATED MICRO-SCANNING TUNNELING MICROSCOPE

Two versions of micro-scanning tunneling microscopes (micro-STMs) have been fabricated. The integrated micro-STMs are fabricated from single crystal silicon using the high-aspect-ratio SCREAM process. Each micr o-STM includes integrated xy comb drive actuators and a torsional z ac tuator with integrated cantilever and tip. One micro-STM measures appr oximately 200 mu m on-a-side and is an example of a STM element for a STM array architecture. Another, larger micro-STM/atomic force microsc ope measures 2 mm on-a-side including a 1 mm long cantilever with a 20 nm diam tip. We demonstrate the operation of this larger STM by obtai ning a STM image of a 200 nm metal conductor on a silicon chip. (C) 19 95 American Institute of Physics.