WET CHEMICAL PATTERNING OF KTP THIN-FILMS FOR NONLINEAR-OPTICAL WAVE-GUIDE APPLICATIONS

Authors
WU SL HO ST XIONG FL CHANG RPH
Citation
Sl. Wu et al., WET CHEMICAL PATTERNING OF KTP THIN-FILMS FOR NONLINEAR-OPTICAL WAVE-GUIDE APPLICATIONS, Journal of the Electrochemical Society, 142(10), 1995, pp. 3556-3557
Citations number
9
Categorie Soggetti
Electrochemistry
Journal title
Journal of the Electrochemical Society → ACNP
ISSN journal
00134651
Volume
142
Issue
10
Year of publication
1995
Pages
3556 - 3557
Database
ISI
SICI code
0013-4651(1995)142:10<3556:WCPOKT>2.0.ZU;2-W
Abstract
A new and simple method to etch and pattern potassium titanyl phosphat e (KTP) thin films has been developed. We found that KTP films on fuse d quartz subtrates can be etched down using a wet chemical mixture of HCl:2H(2)O at 75 degrees C. Using the etchant, rib waveguide structure s have been fabricated with photolithography.