X-ray multilayer supermirrors for the energy range up to 20 keV have b
een theoretically studied and experimentally measured with synchrotron
radiation. A multilayer mirror with 50 W/Si bilayers with different t
hicknesses on the Si substrate has a smooth reflectivity of up to 32%
in the whole energy range from 5 to 22 keV at a grazing incidence angl
e of 0.32 degrees which is considerably larger than using total extern
al reflection. (C) 1995 American Institute of Physics.