ESCA MICROSCOPY BEAMLINE AT ELETTRA

The article describes the ESCA microscopy beamline dedicated to high s patial resolution quantitative and qualitative analysis on surfaces an d interfaces, The scanning microscope is constructed to work both in t ransmission and photoemission within the photon energy range from 200 to 1200 eV with a spatial resolution of similar to 0.1 mu m. A Fresnel zone plate demagnifies the photon beam to submicrometer dimensions wi th 10(9)-10(10) photons/s in the focus spot. A photodiode and a hemisp herical electron energy analyzer are used as detectors for recording t he transmitted x-rays and emitted photoelectrons, respectively, The op eration modes in photoemission give the opportunity to obtain conventi onal energy distribution curve spectra from a microspot or a two-dimen sional micrograph of the spatial distribution and local concentration of a selected element as the sample is mechanically scanned, For condu ctive specimen topography measurements of a selected surface area prob ed by SPEM are possible using a scanning tunnelling microscope, The fi rst test images of a zone plate and an e-beam written specimen with 1 mu m(2) Au squares on Si have shown a spatial resolution better than 0 .2 mu m. (C) 1995 American Institute of Physics.