CHARACTERIZATION OF PIEZOCERAMIC CROSSES WITH LARGE RANGE SCANNING CAPABILITY AND APPLICATIONS FOR LOW-TEMPERATURE SCANNING-TUNNELING-MICROSCOPY

We have developed a large amplitude piezoceramic scanner which should have numerous applications. Scanning tunneling microscopy (STM) and ot her scanning probe microscopies predominantly use piezoceramics for th e scanning elements. Similarly adaptive optics, high resolution lithog raphy, and micromanipulators are other examples of research which regu larly utilize piezoceramic scanners. We present a new geometry for a p iezoceramic scanner which allows for both high resolution (similar to nanometers) and large amplitude (similar to 400 mu m) displacements. T he cross-shaped geometry makes it possible to produce extremely long p ieces with very high tolerances. We have shown its effectiveness by us ing it as the major component of a low temperature STM (LTSTM). This L TSTM is unique in two distinct ways: the scan range at low temperature is a factor of 10 larger than those reported and the coarse. approach mechanism is a single component piezoceramic-making coarse approach i n situ much quieter and easier than in other designs. (C) 1995 America n Institute of Physics.