STUDIES ON NUCLEATION PROCESS IN DIAMOND CVD - AN OVERVIEW OF RECENT DEVELOPMENTS

Authors
Citation
Hm. Liu et Ds. Dandy, STUDIES ON NUCLEATION PROCESS IN DIAMOND CVD - AN OVERVIEW OF RECENT DEVELOPMENTS, DIAMOND AND RELATED MATERIALS, 4(10), 1995, pp. 1173-1188
Citations number
161
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
4
Issue
10
Year of publication
1995
Pages
1173 - 1188
Database
ISI
SICI code
0925-9635(1995)4:10<1173:SONPID>2.0.ZU;2-1
Abstract
This paper presents an updated and systematic overview of the recent d evelopments in studies on nucleation processes in diamond CVD. The nuc leation mechanisms are discussed, and the nucleation enhancement metho ds developed to date are summarized. The effects of surface conditions and deposition parameters on the surface nucleation are described Fin ally, a brief description of theoretical and modeling studies on the s urface nucleation is given.