BASIC STUDY OF THE MEASUREMENT OF 2-D SURFACE PROFILE - (1ST REPORT -TRANSFER-FUNCTION AND RESOLUTION)

Generally, a large-scale 2-D profile is obtained from the combination of a series of 1-D profiles measured by 1-D differential methods. Thes e methods have the disadvantage that the results are affected by rolli ng error of the scanning stages. This paper presents same 2-D differen tial methods which can eliminate the datum errors including the transl ation error in the longitudinal direction and the pitching and rolling errors, and evaluates their basic characteristics in detail. The anal ysis shows that the asymmetric 2-D mixed method is superior to the oth ers with respect to the spatial frequency resolution and the longitudi nal resolution.