FUNDAMENTAL INVESTIGATION OF A PIEZOELECTRIC PUMP FOR A TRACE LIQUID FEED

Generally, peristaltic and syringe pumps have been used to feed liquid s at about 2(ml/min). However, since continuous and low-fluctuation fl ow cannot be easily realized simultaneously with either of these two t ypes of pumps, a new type of microquantity pump is required in the fie ld of pharmaceutical manufacturing. There fore piezoelectric elements were applied to fabricate a X-dimensional pump suitable for multichann el and multistage pumps. Experiments demonstrated that the pump worked successfully and its maximum head was 18(kPa).