CLUSTER IRRADIATION OF MULTILAYERS - MIXING BY ELECTRONIC-ENERGY DEPOSITION

The interaction of C-6(+) cluster ions (energy around 500 keV/atom) wi th SiO-Ni multilayers induces interface mixing near the surface, due t o the highly nonlinear energy deposition into the electron bath when c luster breakup occurs. The mixing is strikingly anisotropic (in the di rection of particle motion). A very large SiO surface layer erosion co efficient (up to 100) and roughness are found in the same experiments.