Atomic structures of Ga and As atoms on GaAs(110) were examined employ
ing a first-principles pseudopotential method. Both Ga and As atoms re
side in the center of a triangle consisting of a surface Ga and two su
rface As atoms in the single-atom chemisorbed state. Adsorption energi
es for Ga and As atoms are 3.1 and 3.5 eV, respectively, Energy barrie
r heights of Ga and As atoms for the migration along the path through
the interstitial channel were found to be 0.6 and 1.0 eV, respectively
. Simulations on the deposition of two atoms reveal that a pair format
ion is stable against separate single-atom chemisorptions.