SCANNING-TUNNELING-MICROSCOPE OBSERVATION OF THE HOMOEPITAXIAL DIAMOND(001) 2X1 RECONSTRUCTION OBSERVED UNDER ATMOSPHERIC-PRESSURE

The 2X1/1X2 surface reconstruction of a homoepitaxial diamond (001) su rface has been examined using a scanning tunneling microscope at an at omic scale and reflection electron microscopy at a macroscopic scale. The monohydride dimer, which is a unit of the surface reconstruction, has a symmetric structure. These monohydride structures contribute to the surface p-type conduction in undoped films. The surface is compose d of elongated dimer rows. Antiphase boundaries have been observed, wh ich is indicative of low-temperature epitaxy where surface migration i s limited. Macroscopic surface flatness has been improved during the g rowth stage in the presence of oxygen and boron which enhance migratio n.