LEVITATION OF A MICROMACHINED ROTOR FOR APPLICATION IN A ROTATING GYROSCOPE

Citation
C. Shearwood et al., LEVITATION OF A MICROMACHINED ROTOR FOR APPLICATION IN A ROTATING GYROSCOPE, Electronics Letters, 31(21), 1995, pp. 1845-1846
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
ISSN journal
00135194
Volume
31
Issue
21
Year of publication
1995
Pages
1845 - 1846
Database
ISI
SICI code
0013-5194(1995)31:21<1845:LOAMRF>2.0.ZU;2-3
Abstract
The design of a micromachined rotating gyroscope is described, incorpo rating an electromagnetically levitated aluminium rotor. The coil desi gn for levitation produces good lateral stability. A 400 mu m diameter , 12 mu m thick rotor is levitated to a height of 30 mu m.