V. Lescuras et al., JET ELECTROCHEMICAL ETCHING OF NICKEL IN A SODIUM-CHLORIDE MEDIUM ASSISTED BY A PULSED-LASER BEAM, Journal of Applied Electrochemistry, 25(10), 1995, pp. 933-939
This paper deals with the jet electrochemical etching of metal, using
nickel drilling as an example; the performance of this technique was i
nvestigated as a function of the nozzle diameter and current density.
The significance of the outer dissolution of metal, due to liquid spre
ading on the vertical substrate facing the nozzle, was estimated; the
hole size was compared to the nozzle diameter. Moreover, a pulsed beam
was; shown to improve the precision of the edge. Applications to shap
e patterning are presented and discussed.