I. Koponen et al., SIMULATIONS OF SUBMICROMETER-SCALE ROUGHENING ON ION-BOMBARDED SOLID-SURFACES, Physical review. B, Condensed matter, 54(19), 1996, pp. 13502-13505
Roughening of amorphous carbon surfaces bombarded by 5-keV Ar ions is
studied by using Monte Carlo simulations. Sputtering-induced erosion i
s treated in detail by simulating the entire collision cascades origin
ated by the bombarding Ar ions. Surface relaxation due to diffusion is
described by a Wolf-Villain-type discrete model. The simulations show
that bombarded surfaces have self-affine topography on the submicrome
ter-scale. For normal incidence the roughness exponent is alpha approx
imate to 0.37-0.45, diminishing to alpha approximate to 0.25 when the
angle of incidence is increased to 60 degrees. In the studied cases th
e roughness exponent alpha is nearly independent of the relaxation of
the surface. The dynamic exponent z and growth exponent beta show a cl
ear dependence on the relaxation. Without relaxation we found values b
eta approximate to 0.3 and z approximate to 1, and with relaxation bet
a approximate to 0.14-0.20 and z approximate to 1.6-2.6.