HYBRID-ALIGNED NEMATIC LIQUID-CRYSTAL MODULATORS FABRICATED ON VLSI CIRCUITS

A new method for fabricating analog Light modulators on VLSI devices i s described. The process is fully compatible with devices fabricated b y commercial VLSI foundries, and the assembly of the modulator structu res requires a small number of simple processing steps. The modulators are capable of analog amplitude or phase modulation and can operate a t video rates and at low voltages (2.2 V). The modulation mechanism an d the process yielding the modulator structures are described. Experim ental data are presented. (C) 1995 Optical Society of America