STRUCTURAL-PROPERTIES OF A-C-H DEPOSITED USING SADDLE-FIELD GLOW-DISCHARGE DECOMPOSITION OF METHANE

Authors
LIM PK GASPARI F ZUKOTYNSKI S
Citation
Pk. Lim et al., STRUCTURAL-PROPERTIES OF A-C-H DEPOSITED USING SADDLE-FIELD GLOW-DISCHARGE DECOMPOSITION OF METHANE, Journal of applied physics, 78(9), 1995, pp. 5307-5312
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
9
Year of publication
1995
Pages
5307 - 5312
Database
ISI
SICI code
0021-8979(1995)78:9<5307:SOADUS>2.0.ZU;2-4
Abstract
Diamondlike hydrogenated carbon films were deposited using saddle-fiel d glow discharge in pure methane. The structure of the films was studi ed using x-ray photoelectron spectroscopy, x-ray stimulated Auger elec tron spectroscopy, and Raman spectroscopy. It was found that for appro priate conditions of pressure and substrate bias a very high percentag e of sp(3) bonding could be achieved. (C) 1995 American Institute of P hysics.