OBSERVATION OF SYSTEMATIC DEVIATIONS OF PERIOD IN W SI AND W/C MULTILAYERS/

Cross-sectional transmission electron microscopy, Selected area electr on diffraction, and small-angle x-ray diffraction have been used to ob serve the systematic deviations of period in W/Si and W/C multilayers. The mean periods decreased gradually as the detected regions were loc ated farther away from the substrate. To avoid destroying the multilay er, a method is suggested to measure the systematic deviation of perio d by using soft x rays with wavelengths below and above an absorption edge;and hard x rays such as Cu K alpha(1). (C) 1995 American Institut e of Physics.