DIFFUSION OF TIN IN GERMANIUM STUDIED BY SECONDARY-ION MASS-SPECTROMETRY

The diffusion of tin in intrinsic germanium has been studied in the te mperature range from 555 to 930 degrees C by secondary ion mass spectr ometry. Tin has been indiffused under vacuum conditions both from the gas phase and from thin films. In both cases, pure metal was used as a source of tin. In the studied temperature range the diffusion coeffic ient of tin as a function of temperature can be expressed as D(cm(2)/s ) = 8.4 X 10(2) exp[(-3.26 eV)/kT]. Based on the similarities between tin diffusion and germanium self-diffusion, it is concluded that tin d iffuses in germanium via the monovacancy mechanism. (C) 1995 American Institute of Physics.