METAL-N-6H-SIC SURFACE-BARRIER HEIGHT - EXPERIMENTAL-DATA AND DESCRIPTION IN THE TRADITIONAL TERMS

This work compares our experimental data on surface barrier height in structures metal-n-6H-SiC for several metals (Al, Au, Mo, Cr) with oth er data available and with classical models of surface barrier formati on. We observed decreasing of barrier height with increasing of donors concentration for the structures Au-n-6H-SiC, Mo-n-6H-SiC and Al-n-GH -SiC. We estimate the average surface energy level for (0001)-Si-faced n-6H-SiC, appearing in capacitance-voltage (C-V) measurements, to be about 0.3E(g) at room temperature (E(g) is the energy band gap) and co rresponding surface states density to be about 10(13) cm(-2) eV(-1), b ased both on our data and data of other authors. (C) 1995 American Ins titute of Physics.