FABRICATION OF PB1-XLAXTIO3 FERROELECTRIC CERAMIC NANOCRYSTALLINE THIN-FILMS

Lead lanthanum titanate (PLT) nanocrystalline thin films were fabricat ed on monocrystalline silicon wafers by a new sol-gel method with micr otechnology. IR spectroscopy, thermogravimetric analysis, differential thermal analysis, X-ray diffraction (XRD) and scanning electron micro scopy (SEM) were used to study the synthesis process and the films obt ained. The preparation of a stable precursor solution and the choice o f preheating temperature are two cruxes to fabricating nanocrystalline thin films. XRD and SEM showed that the thin films possess a polycrys talline perovskite structure, their surfaces are smooth, and the cryst al grains are uniform and spherical or elliptical in form, the average grain sizes are between 20 and 80 nm, the thickness of the films is a bout 1 mu m.