The thermal stability of spin valves consisting of amorphous CoFeB lay
er(s) has been investigated. The structural properties were investigat
ed by XRD and extended X-ray absorption spectroscopy for as-deposited
and annealed films. The structure of CoFeB layer was confirmed amorpho
us and stable up to about 250 degrees C. After annealing at 300 degree
s C, it became fee-like. The MR ratio of NiO/CoFeB(2 nm)/Cu(2 nm)/CoFe
B(6 nm) increased from Lt to about 8% after annealing at 300 degrees C
, while that of Co(2 nm)/Cu(2 nm)/CoFeB(4 nm) increased from 6 to abou
t 10%.