AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM

Authors
LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D MONDELLI AA STENGL G
Citation
Y. Lee et al., AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 385(2), 1997, pp. 204-208
Citations number
6
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
385
Issue
2
Year of publication
1997
Pages
204 - 208
Database
ISI
SICI code
0168-9002(1997)385:2<204:AESMOA>2.0.ZU;2-Z
Abstract
A multicusp ion source has been designed for use in ion projection lit hography. Longitudinal energy spreads of the extracted positive hydrog en ion beam have been studied using a retarding field energy analyzer, It has been found that the filament-discharge multicusp ion source ca n deliver a beam with an energy spread less than 3 eV which is require d for the ALG-1000 machine. The multicusp ion source can also deliver the current required for the application.