CHARACTERIZATION OF SIO2 THIN-FILM OBTAINED BY THE SOL-GEL ROUTE FROMTEOS AND TRITON X45

SiO2 thin films prepared by the sol-gel process from TEOS as alkoxide precursors and Triton X45 as additive have been investigated by vibrat ional spectroscopy, thermal analysis, and N-2 adsorption/desorption me asurements. These studies indicate that microporous materials capable of retaining both high surface area and free silanol concentration at 600 degrees C were obtained. These findings are discussed in relation to the structure of the surface silanols, interaction between silanols , and the additive and the thermal degradation of the latter. On these bases a formation mechanism of the porous structure is proposed.