CHANGES IN SURFACE-AREA AND COMPOSITION DURING GRINDING OF SILICON INENVIRONMENTS OF VARIOUS QUALITY

Citation
K. Tkacova et al., CHANGES IN SURFACE-AREA AND COMPOSITION DURING GRINDING OF SILICON INENVIRONMENTS OF VARIOUS QUALITY, Journal of materials research, 10(11), 1995, pp. 2728-2735
Citations number
29
Categorie Soggetti
Material Science
ISSN journal
08842914
Volume
10
Issue
11
Year of publication
1995
Pages
2728 - 2735
Database
ISI
SICI code
0884-2914(1995)10:11<2728:CISACD>2.0.ZU;2-W
Abstract
Changes in particle size, surface properties, and composition brought about by planetary grinding of silicon in air and various permittivity liquids were investigated, Using a variety of spectroscopic technique s (ESR, IRS, and XPS), a mechanically induced surface oxidation was pr oved. While at grinding in air and organic liquids a part of the cente rs originating from dangling orbitals on Si-III are preserved, the pro perties of water-ground silicon are fully governed by the oxide surfac e shell. The most effective particle size reduction and surface protec tion can be reached by grinding in nonpolar liquids.