EXTRAORDINARY ADHESION OF A SIMPLE NIOBIUM METAL-BONDING STRUCTURE

Authors
CHEN HS BACON DD LAW HH KAMMLOTT GW WU TC
Citation
Hs. Chen et al., EXTRAORDINARY ADHESION OF A SIMPLE NIOBIUM METAL-BONDING STRUCTURE, Journal of materials research, 10(11), 1995, pp. 2870-2874
Citations number
9
Categorie Soggetti
Material Science
Journal title
Journal of materials research → ACNP
ISSN journal
08842914
Volume
10
Issue
11
Year of publication
1995
Pages
2870 - 2874
Database
ISI
SICI code
0884-2914(1995)10:11<2870:EAOASN>2.0.ZU;2-4
Abstract
Extraordinary adhesion of a Nb-based/Au-Sn metallization structure on a SiO2/Si substrate has been observed by a tensile pull test. The meta llization bond fails mostly via fracture through either the Si substra te or epoxy adhesive. The intrinsic adhesion pull strength of the meta llization scheme is concluded to be greater than 10 kpsi, and the adhe sion exceeds the Si-Si cohesive strength. The Nb-Si and Nb-O bonds at the interface are thermodynamically stable.