We prepared ion beam modified microbridges based on thin sputtered or
laser ablated YBCO films on SrTiO3 substrates. The microbridges with a
width of 10 mu m were irradiated through slits in a 700 nm thick doub
le layer resist mask. in our experiments we used O+ ions with an ion e
nergy of 30 ke V or 100 kE V varying the dose between 10(13) ions . cm
(-2) and 10(14) ions cm(-2). We investigated the influence of film thi
ckness and slit width on the superconducting properties of these junct
ions. We show the temperature dependence of the junctions properties o
n microwave radiation or external magnetic fields.