FABRICATION OF A CONCENTRIC-CIRCULAR FOCUSING GRATING COUPLER BY A CONIC-WAVE-FRONT INTERFERENCE METHOD AND LIGHT-CONVERGENCE EXPERIMENTS USING THE COUPLER
S. Nishiwaki et al., FABRICATION OF A CONCENTRIC-CIRCULAR FOCUSING GRATING COUPLER BY A CONIC-WAVE-FRONT INTERFERENCE METHOD AND LIGHT-CONVERGENCE EXPERIMENTS USING THE COUPLER, Applied optics, 34(31), 1995, pp. 7372-7382
An interference method utilizing conic-wave-front light for the fabric
ation of a concentric-circular and chirped grating is proposed. The de
sign method and fabrication of an interference lens that generates con
ic-wave-front light are also shown. A focusing element is constructed
from a concentric-circular grating coupler with a 0.4-mm diameter and
a concentric-circular focusing grating coupler with an annular apertur
e of 2-mm focal length and 2.0-4.0-mm diameter. Light-convergence expe
riments using the focusing element were able to obtain a focusing spot
of 0.5 mu m x 0.7 mu m at half-intensity widths for a wavelength of 8
20 nm in combination with liquid-crystal polarization elements. (C) 19
95 Optical Society of America