Fj. Gomez et al., AMORPHOUS SIC LAYERS DEPOSITED BY ELECTRON-CYCLOTRON-RESONANCE PLASMA- SPECTROSCOPIC ELLIPSOMETRIC MEASUREMENTS, Journal of non-crystalline solids, 191(1-2), 1995, pp. 164-173
Hydrogenated silicon carbide was deposited in electron cyclotron reson
ance plasma. Pure methane and silane diluted with 5% argon were used a
s gas precursors, The compositions of the layers depends on the CH4/Si
H4 flow ratio used for deposition. For flow ratios equal to or larger
than 2, around 80% of the layer consists of Si-C bonds, the rest being
Si-H-n and C-H-n bonds. The amorphous silicon content increases as th
e flow ratio decreases, as indicated from ellipsometry and infrared me
asurements.