EFFECT OF DEPOSITION TEMPERATURE ON PHASE-FORMATION IN NB SI MULTILAYERS/

Authors
ZHANG M YU W WANG WK
Citation
M. Zhang et al., EFFECT OF DEPOSITION TEMPERATURE ON PHASE-FORMATION IN NB SI MULTILAYERS/, Journal of materials science letters, 16(3), 1997, pp. 241-243
Citations number
18
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
16
Issue
3
Year of publication
1997
Pages
241 - 243
Database
ISI
SICI code
0261-8028(1997)16:3<241:EODTOP>2.0.ZU;2-C